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- 98004846 contributor B8322015.
- 98004846 created "1998.".
- 98004846 date "1998".
- 98004846 date "1998.".
- 98004846 dateCopyrighted "1998.".
- 98004846 description "Includes bibliographical references (p. 883-899) and index.".
- 98004846 extent "xx, 911, 3 p. :".
- 98004846 identifier "0072907223".
- 98004846 identifier 98004846.html.
- 98004846 identifier 98004846.html.
- 98004846 issued "1998".
- 98004846 issued "1998.".
- 98004846 language "eng".
- 98004846 publisher "Boston, Ma. : WCB,".
- 98004846 subject "681/.2 21".
- 98004846 subject "Microelectromechanical systems.".
- 98004846 subject "TK7872.T6 K68 1998".
- 98004846 subject "Transducers.".
- 98004846 title "Micromachined transducers sourcebook / Gregory T.A. Kovacs.".
- 98004846 type "text".