Matches in Library of Congress for { <http://lccn.loc.gov/98010353> ?p ?o. }
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- 98010353 contributor B8328452.
- 98010353 created "c1998.".
- 98010353 date "1998".
- 98010353 date "c1998.".
- 98010353 dateCopyrighted "c1998.".
- 98010353 description "Includes bibliographical references and index.".
- 98010353 extent "xxviii, 616 p. :".
- 98010353 identifier "3540616721 (alk. paper)".
- 98010353 identifier 98010353-d.html.
- 98010353 identifier 98010353-t.html.
- 98010353 issued "1998".
- 98010353 issued "c1998.".
- 98010353 language "eng".
- 98010353 publisher "Berlin ; New York : Springer,".
- 98010353 subject "621.3815/2 21".
- 98010353 subject "Semiconductor wafers Cleaning.".
- 98010353 subject "Silicon Surfaces.".
- 98010353 subject "Surface preparation.".
- 98010353 subject "TK7871.85 .U48 1998".
- 98010353 title "Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing / Takeshi Hattori (ed.).".
- 98010353 type "text".