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- 98016713 contributor B8335729.
- 98016713 created "c1998.".
- 98016713 date "1998".
- 98016713 date "c1998.".
- 98016713 dateCopyrighted "c1998.".
- 98016713 description "Includes bibliographical references and index.".
- 98016713 extent "xii, 780 p. :".
- 98016713 identifier "0824799534 (alk. paper)".
- 98016713 identifier 98016713-d.html.
- 98016713 issued "1998".
- 98016713 issued "c1998.".
- 98016713 language "eng".
- 98016713 publisher "New York : Marcel Dekker,".
- 98016713 subject "621.3815/31 21".
- 98016713 subject "Integrated circuits Masks.".
- 98016713 subject "Manufacturing processes.".
- 98016713 subject "Metal oxide semiconductors, Complementary Design and construction.".
- 98016713 subject "Microlithography Industrial applications.".
- 98016713 subject "TK7836 .M525 1998".
- 98016713 title "Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith.".
- 98016713 type "text".