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- 98028503 contributor B8349664.
- 98028503 created "1998.".
- 98028503 date "1998".
- 98028503 date "1998.".
- 98028503 dateCopyrighted "1998.".
- 98028503 description "Includes bibliographical references and indexes.".
- 98028503 extent "xi, 270 p. :".
- 98028503 identifier "1558994297".
- 98028503 isPartOf "Materials Research Society Symposium proceedings ; v. 523".
- 98028503 isPartOf "Materials Research Society symposia proceedings ; v. 523.".
- 98028503 issued "1998".
- 98028503 issued "1998.".
- 98028503 language "eng".
- 98028503 publisher "Warrendale, Pa. : Materials Research Society,".
- 98028503 subject "621.3815/2 21".
- 98028503 subject "Electron microscopy Congresses.".
- 98028503 subject "Integrated circuits Ultra large scale integration Testing Congresses.".
- 98028503 subject "Semiconductors Testing Congresses.".
- 98028503 subject "TK7874.76 .E44 1998".
- 98028503 title "Electron microscopy of semiconducting materials and ULSI devices / editors, Clive Hayzelden, Crispin Hetherington, Frances Ross.".
- 98028503 type "text".