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- 98045576 alternative "Optical MEMS".
- 98045576 alternative "Selected papers on optical micro-electro-mechanical systems".
- 98045576 contributor B8369024.
- 98045576 created "c1999.".
- 98045576 date "1999".
- 98045576 date "c1999.".
- 98045576 dateCopyrighted "c1999.".
- 98045576 description "Includes bibliographical references and indexes.".
- 98045576 extent "xvi, 628 p. :".
- 98045576 identifier "081943129X (alk. paper)".
- 98045576 isPartOf "SPIE milestone series ; v. MS 153".
- 98045576 issued "1999".
- 98045576 issued "c1999.".
- 98045576 language "eng".
- 98045576 publisher "Bellingham, Wash. : SPIE Optical Engineering Press,".
- 98045576 subject "681/.4 21".
- 98045576 subject "Microelectromechanical systems.".
- 98045576 subject "Microelectronics.".
- 98045576 subject "Optical MEMS.".
- 98045576 subject "TK7874 .S4145 1999".
- 98045576 title "Optical MEMS".
- 98045576 title "Selected papers on optical MEMS / Victor M. Bright, editor.".
- 98045576 title "Selected papers on optical micro-electro-mechanical systems".
- 98045576 type "text".