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- 98049136 contributor B8373097.
- 98049136 created "c1998.".
- 98049136 date "1998".
- 98049136 date "c1998.".
- 98049136 dateCopyrighted "c1998.".
- 98049136 description "Includes bibliographical references and index.".
- 98049136 extent "xi, 248 p. :".
- 98049136 identifier "1558994246".
- 98049136 isPartOf "Materials Research Society symposia proceedings ; v. 518.".
- 98049136 isPartOf "Materials Research Society symposium proceedings ; v. 518".
- 98049136 issued "1998".
- 98049136 issued "c1998.".
- 98049136 language "eng".
- 98049136 publisher "Warrendale, Pa. : Materials Research Society,".
- 98049136 subject "620.1/1/072 21".
- 98049136 subject "Materials Research Equipment and supplies Congresses.".
- 98049136 subject "Microelectromechanical systems Congresses.".
- 98049136 subject "TA404.2 .M53 1998".
- 98049136 title "Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A. / editors, Stuart Brown ... [et al.].".
- 98049136 type "text".