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- 98087959 contributor B8393818.
- 98087959 contributor B8393819.
- 98087959 created "c1998.".
- 98087959 date "1998".
- 98087959 date "c1998.".
- 98087959 dateCopyrighted "c1998.".
- 98087959 description "Includes bibliographical references and indexes.".
- 98087959 description "System requirements for Macintosh computer disk: Macintosh, Power Mac, or compatible; hard disk with 4 MB free; 2 MB RAM; System 7 or later; Acrobat Reader.".
- 98087959 description "System requirements for Unix computer disk: SUN Sparcstation; hard disk with 8 MB free; 32 MB RAM; SunOS version 4.1.3 or later, Solaris 2.3, 2.4. or 2.4 or later; Acrobat Reader.".
- 98087959 description "System requirements for accompanying computer disc: IBM PC or compatible; hard disk with at least 4 MB free; at least 4 MB RAM; Windows 95 or Windows 3.1.; Acrobat Reader.".
- 98087959 extent "xv, 960 p. :".
- 98087959 identifier "1563967537 (set)".
- 98087959 identifier "1563968681 (CD-ROM)".
- 98087959 isPartOf "AIP conference proceedings ; no. 449.".
- 98087959 isPartOf "AIP conference proceedings, 0094-243x ; 449".
- 98087959 issued "1998".
- 98087959 issued "c1998.".
- 98087959 language "eng".
- 98087959 publisher "Woodbury, NY : American Institute of Physics,".
- 98087959 requires "System requirements for Macintosh computer disk: Macintosh, Power Mac, or compatible; hard disk with 4 MB free; 2 MB RAM; System 7 or later; Acrobat Reader.".
- 98087959 requires "System requirements for Unix computer disk: SUN Sparcstation; hard disk with 8 MB free; 32 MB RAM; SunOS version 4.1.3 or later, Solaris 2.3, 2.4. or 2.4 or later; Acrobat Reader.".
- 98087959 requires "System requirements for accompanying computer disc: IBM PC or compatible; hard disk with at least 4 MB free; at least 4 MB RAM; Windows 95 or Windows 3.1.; Acrobat Reader.".
- 98087959 subject "621.39/5 21".
- 98087959 subject "Integrated circuits Ultra large scale integration Congresses Software.".
- 98087959 subject "Integrated circuits Ultra large scale integration Congresses.".
- 98087959 subject "TK7874.76 .C49 1998".
- 98087959 title "Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland, March 1998 / editors, David G. Seiler ... [et al.].".
- 98087959 type "text".