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- 98088036 alternative "4th International Workshop on Statistical Metrology".
- 98088036 contributor B8393879.
- 98088036 contributor B8393880.
- 98088036 created "c1999.".
- 98088036 date "1999".
- 98088036 date "c1999.".
- 98088036 dateCopyrighted "c1999.".
- 98088036 description "Includes bibliographical references.".
- 98088036 extent "vi, 65 p. :".
- 98088036 identifier "0780351541 (softbound edition)".
- 98088036 identifier "078035155X (microfiche edition)".
- 98088036 issued "1999".
- 98088036 issued "c1999.".
- 98088036 language "eng".
- 98088036 publisher "Piscataway, NJ, USA : Purchased from: IEEE Service Center Single Publication Sales Unit,".
- 98088036 subject "621.3815/2/0287 21".
- 98088036 subject "Semiconductors Characterization Statistical methods Congresses.".
- 98088036 subject "Semiconductors Measurement Congresses.".
- 98088036 subject "TK7871.85 .I5844 1999".
- 98088036 title "1999 4th International Workshop on Statistical Metrology / technical co-sponsored by IEEE Electron Devices Society ; co-sponsored by VLSI symposium, The Japan Society of Applied Physics, IEEE ED Tokyo Chapter ; in cooperation with the Institute of Electronics, Information and Communication Engineers.".
- 98088036 title "4th International Workshop on Statistical Metrology".
- 98088036 type "text".