Matches in Library of Congress for { <http://lccn.loc.gov/98096861> ?p ?o. }
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- 98096861 contributor B8397605.
- 98096861 created "c1998.".
- 98096861 date "1998".
- 98096861 date "c1998.".
- 98096861 dateCopyrighted "c1998.".
- 98096861 description "Includes bibliographical references (p. 297-315).".
- 98096861 extent "xii, 356 p. :".
- 98096861 identifier "0966637607".
- 98096861 issued "1998".
- 98096861 issued "c1998.".
- 98096861 language "eng".
- 98096861 publisher "El Cerrito, Calif. : MEMS Precision Instruments,".
- 98096861 subject "621.3815/2 21".
- 98096861 subject "Microelectromechanical systems Design and construction.".
- 98096861 subject "Microfabrication.".
- 98096861 subject "Semiconductor wafers.".
- 98096861 subject "Semiconductors Etching.".
- 98096861 subject "Silicon Etching.".
- 98096861 subject "TK7875 .K45 1998".
- 98096861 title "Microfabricated high aspect ratio silicon flexures : HEXSIL, RIE, and KOH etched design and fabrication / Christopher G. Keller.".
- 98096861 type "text".