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- 98100823 contributor B8398636.
- 98100823 contributor B8398637.
- 98100823 contributor B8398638.
- 98100823 created "c1997.".
- 98100823 date "1997".
- 98100823 date "c1997.".
- 98100823 dateCopyrighted "c1997.".
- 98100823 description "Includes bibliographic references and indexes.".
- 98100823 extent "xiii, 588 p. :".
- 98100823 identifier "1566771374".
- 98100823 isPartOf "Proceedings (Electrochemical Society) ; v. 97-10.".
- 98100823 isPartOf "Proceedings / Electrochemical Society ; v. 97-10".
- 98100823 issued "1997".
- 98100823 issued "c1997.".
- 98100823 language "eng".
- 98100823 publisher "Pennington, New Jersey : Electrochemical Society,".
- 98100823 subject "Electric insulators and insulation Thin films Congresses.".
- 98100823 subject "Silicon dioxide Congresses.".
- 98100823 subject "Silicon nitride Congresses.".
- 98100823 subject "TK7872.T55 S54 1997".
- 98100823 subject "Thin film devices Congresses.".
- 98100823 title "Silicon nitride and silicon dioxide thin insulating films : proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / editors M. Jamal Deen ... [et al.] ; Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society].".
- 98100823 type "text".