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- 98107376 contributor B8405792.
- 98107376 created "1997.".
- 98107376 date "1997".
- 98107376 date "1997.".
- 98107376 dateCopyrighted "1997.".
- 98107376 description "Includes bibliographical references.".
- 98107376 description "Thesis (Ph. D.)--Eidgenössische Technische Hochscule Zürich, 1997.".
- 98107376 extent "xvii, 183 p. :".
- 98107376 identifier "3896492292".
- 98107376 isPartOf "Series in microelectronics, 0936-5362 ; v. 69".
- 98107376 issued "1997".
- 98107376 issued "1997.".
- 98107376 language "eng".
- 98107376 publisher "Konstanz : Hartung-Gorre,".
- 98107376 subject "621.3815 21".
- 98107376 subject "Ion implantation Computer simulation.".
- 98107376 subject "Semiconductor doping Computer simulation.".
- 98107376 subject "Semiconductors Design and construction Computer simulation.".
- 98107376 subject "TK7871.85 .H64 1997".
- 98107376 title "Development and application of a model hierarchy for silicon process simulation / Alexander Höfler.".
- 98107376 type "text".