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- 98122037 contributor B8422238.
- 98122037 contributor B8422239.
- 98122037 created "c1997.".
- 98122037 date "1997".
- 98122037 date "c1997.".
- 98122037 dateCopyrighted "c1997.".
- 98122037 description "Includes bibliographic references and author index.".
- 98122037 extent "vii, 264 p. :".
- 98122037 identifier "0819426105".
- 98122037 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3183.".
- 98122037 isPartOf "SPIE proceedings series ; v. 3183".
- 98122037 issued "1997".
- 98122037 issued "c1997.".
- 98122037 language "eng".
- 98122037 publisher "Bellingham, Washington : SPIE,".
- 98122037 subject "621.3815 21".
- 98122037 subject "Integrated circuits Design and construction Congresses.".
- 98122037 subject "Integrated circuits Inspection Congresses.".
- 98122037 subject "Microlithography Industrial applications Congresses.".
- 98122037 subject "Process control Congresses.".
- 98122037 subject "TK7874 .M48745 1997".
- 98122037 title "Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore / Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [et al.] ; cooperating organizations Nanyang Technological University (Singapore) ... [et al.] ; published by SPIE--the International Society for Optical Engineering.".
- 98122037 type "text".