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- 98122069 contributor B8422290.
- 98122069 contributor B8422291.
- 98122069 created "c1997.".
- 98122069 date "1997".
- 98122069 date "c1997.".
- 98122069 dateCopyrighted "c1997.".
- 98122069 description "Includes bibliographic references and index.".
- 98122069 extent "viii, 198 p. :".
- 98122069 identifier "0819426482".
- 98122069 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3216.".
- 98122069 isPartOf "SPIE proceedings series ; v. 3216".
- 98122069 issued "1997".
- 98122069 issued "c1997.".
- 98122069 language "eng".
- 98122069 publisher "Bellingham, Wash., USA : SPIE,".
- 98122069 subject "621.381 21".
- 98122069 subject "Integrated circuits Very large scale integration Congresses.".
- 98122069 subject "Microelectronics Congresses.".
- 98122069 subject "TK7874 .M458 1997".
- 98122069 title "Microelectronic manufacturing yield, reliability, and failure analysis III : 1-2 October, 1997, Austin, Texas / Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] the Electrochemical Society.".
- 98122069 type "text".