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- 98122092 contributor B8422325.
- 98122092 contributor B8422326.
- 98122092 created "c1997.".
- 98122092 date "1997".
- 98122092 date "c1997.".
- 98122092 dateCopyrighted "c1997.".
- 98122092 description "Includes bibliographic references and index.".
- 98122092 extent "ix, 270 p. :".
- 98122092 identifier "0819426458".
- 98122092 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 3213".
- 98122092 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3213.".
- 98122092 issued "1997".
- 98122092 issued "c1997.".
- 98122092 language "eng".
- 98122092 publisher "Bellingham, Washington : SPIE,".
- 98122092 subject "621.3815 21".
- 98122092 subject "Dielectric films Congresses.".
- 98122092 subject "Integrated circuits Design and construction Congresses.".
- 98122092 subject "Metallizing Congresses.".
- 98122092 subject "Plasma etching Congresses.".
- 98122092 subject "TK7874 .P7519 1997".
- 98122092 title "Process, equipment, and materials control in integrated circuit manufacturing III : 1-2 October 1997, Austin, Texas / Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society.".
- 98122092 type "text".