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- 98122103 contributor B8422347.
- 98122103 contributor B8422348.
- 98122103 created "c1997.".
- 98122103 date "1997".
- 98122103 date "c1997.".
- 98122103 dateCopyrighted "c1997.".
- 98122103 description "Includes bibliographic references and index.".
- 98122103 extent "v, 214 p. :".
- 98122103 identifier "081942658X".
- 98122103 isPartOf "Proceedings of SPIE, 0277-786X ; v. 3226".
- 98122103 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3226.".
- 98122103 issued "1997".
- 98122103 issued "c1997.".
- 98122103 language "eng".
- 98122103 publisher "Bellingham, Wash. : SPIE,".
- 98122103 subject "621.381/045 21".
- 98122103 subject "Microelectromechanical systems Congresses.".
- 98122103 subject "Microelectronics Congresses.".
- 98122103 subject "Optoelectronics Congresses.".
- 98122103 subject "TK7874 .M47382 1997".
- 98122103 title "Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas / M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology.".
- 98122103 type "text".