Matches in Library of Congress for { <http://lccn.loc.gov/98122576> ?p ?o. }
Showing items 1 to 22 of
22
with 100 items per page.
- 98122576 contributor B8422884.
- 98122576 contributor B8422885.
- 98122576 created "c1997.".
- 98122576 date "1997".
- 98122576 date "c1997.".
- 98122576 dateCopyrighted "c1997.".
- 98122576 description "Includes bibliographic references and author index.".
- 98122576 extent "vii, 134 p. :".
- 98122576 identifier "0819426571".
- 98122576 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 3225".
- 98122576 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3225.".
- 98122576 issued "1997".
- 98122576 issued "c1997.".
- 98122576 language "eng".
- 98122576 publisher "Bellingham, Washington : SPIE,".
- 98122576 subject "621.3815/2 21".
- 98122576 subject "Measurement Congresses.".
- 98122576 subject "Microlithography Congresses.".
- 98122576 subject "Micromachining Congresses.".
- 98122576 subject "TJ1191.5 .M532 1997".
- 98122576 title "Microlithography and metrology in micromachining III : 29-30 September, 1997, Austin, Texas / Craig R. Friedrich, Akira Umeda, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Solid State Technology ; published by SPIE--the International Society for Optical Engineering.".
- 98122576 type "text".