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- 98125241%2F%2Fr98 contributor B8425877.
- 98125241%2F%2Fr98 contributor B8425878.
- 98125241%2F%2Fr98 created "c1997.".
- 98125241%2F%2Fr98 date "1997".
- 98125241%2F%2Fr98 date "c1997.".
- 98125241%2F%2Fr98 dateCopyrighted "c1997.".
- 98125241%2F%2Fr98 description "Includes bibliographic references and author index.".
- 98125241%2F%2Fr98 extent "vii, 132 p. :".
- 98125241%2F%2Fr98 identifier "081942546X".
- 98125241%2F%2Fr98 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3214.".
- 98125241%2F%2Fr98 isPartOf "SPIE proceedings series, 0277-786X ; v. 3214".
- 98125241%2F%2Fr98 issued "1997".
- 98125241%2F%2Fr98 issued "c1997.".
- 98125241%2F%2Fr98 language "eng".
- 98125241%2F%2Fr98 publisher "Bellingham, Wash. : SPIE,".
- 98125241%2F%2Fr98 subject "621.39/5 21".
- 98125241%2F%2Fr98 subject "Dielectric films Congresses.".
- 98125241%2F%2Fr98 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 98125241%2F%2Fr98 subject "Metallizing Congresses.".
- 98125241%2F%2Fr98 subject "Plasma etching Congresses.".
- 98125241%2F%2Fr98 subject "TK7874 .M86426 1997".
- 98125241%2F%2Fr98 title "Multilevel interconnect technology : 1-2 October 1997, Austin, Texas / Divyseh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society.".
- 98125241%2F%2Fr98 type "text".