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- 98125245 contributor B8425885.
- 98125245 contributor B8425886.
- 98125245 created "c1997.".
- 98125245 date "1997".
- 98125245 date "c1997.".
- 98125245 dateCopyrighted "c1997.".
- 98125245 description "Includes bibliographical references and author index.".
- 98125245 extent "v, 186 p. :".
- 98125245 identifier "0819426474".
- 98125245 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3215.".
- 98125245 isPartOf "SPIE proceedings series, 0277-786X ; v. 3215".
- 98125245 issued "1997".
- 98125245 issued "c1997.".
- 98125245 language "eng".
- 98125245 publisher "Bellingham, Wash., USA : SPIE,".
- 98125245 subject "621.3815 21".
- 98125245 subject "Integrated circuits Design and construction Congresses.".
- 98125245 subject "Manufacturing processes Congresses.".
- 98125245 subject "Optical pattern recognition Congresses.".
- 98125245 subject "Semiconductors Design and construction Congresses.".
- 98125245 subject "TK7871.85 .I485 1997".
- 98125245 title "In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas / Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society.".
- 98125245 type "text".