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- 98143985 contributor B8446530.
- 98143985 contributor B8446531.
- 98143985 created "c1998.".
- 98143985 date "1998".
- 98143985 date "c1998.".
- 98143985 dateCopyrighted "c1998.".
- 98143985 description "Includes bibliographical references and index.".
- 98143985 extent "x, 238 p. :".
- 98143985 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3202.".
- 98143985 isPartOf "SPIE proceedings series ; v. 3202".
- 98143985 issued "1998".
- 98143985 issued "c1998.".
- 98143985 language "eng".
- 98143985 publisher "Bellingham, Wash., USA : SPIE,".
- 98143985 subject "629.8/92 21".
- 98143985 subject "Microelectromechanical systems Congresses.".
- 98143985 subject "Microfabrication Congresses.".
- 98143985 subject "Microrobots Congresses.".
- 98143985 subject "Robotics Congresses.".
- 98143985 subject "TJ210.3 .M534 1998".
- 98143985 title "Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania / Armin Sulzmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, NIST--National Institute of Standards and Technology, CIMS--Coalition for Intelligent Manufacturing Systems, [and] A-CIMS--Academic Coalition for Intelligent Manufacturing Systems.".
- 98143985 type "text".