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- 98150852 contributor B8453790.
- 98150852 created "1996.".
- 98150852 date "1996".
- 98150852 date "1996.".
- 98150852 dateCopyrighted "1996.".
- 98150852 description "Includes bibliographical references.".
- 98150852 extent "106 p. :".
- 98150852 identifier "5020152099".
- 98150852 isPartOf "Trudy FTIAN, 0868-7129 ; t. 10".
- 98150852 issued "1996".
- 98150852 issued "1996.".
- 98150852 language "rus eng".
- 98150852 language "rus".
- 98150852 publisher "Moskva : Nauka ; Fizmatlit,".
- 98150852 subject "Integrated circuits Design and construction.".
- 98150852 subject "Plasma engineering.".
- 98150852 subject "TK7874 .P7396 1996".
- 98150852 title "Problemy submikronnoĭ tekhnologii / A.A. Orlikovskiĭ.".
- 98150852 type "text".