Matches in Library of Congress for { <http://lccn.loc.gov/98158683> ?p ?o. }
Showing items 1 to 25 of
25
with 100 items per page.
- 98158683 alternative "Thin film processes".
- 98158683 contributor B8462042.
- 98158683 contributor B8462043.
- 98158683 contributor B8462044.
- 98158683 created "c1998.".
- 98158683 date "1998".
- 98158683 date "c1998.".
- 98158683 dateCopyrighted "c1998.".
- 98158683 description "Includes bibliographical references and indexes.".
- 98158683 extent "ix, 370 p. :".
- 98158683 identifier "1566771838".
- 98158683 isPartOf "Proceedings (Electrochemical Society) ; v. 97-30.".
- 98158683 isPartOf "Proceedings / Electrochemical Society ; v. 97-30".
- 98158683 issued "1998".
- 98158683 issued "c1998.".
- 98158683 language "eng".
- 98158683 publisher "Pennington, NJ : Electrochemical Society,".
- 98158683 subject "621.3815/2 21".
- 98158683 subject "Plasma etching Congresses.".
- 98158683 subject "TK7872.T55 I58 1997".
- 98158683 subject "Thin film devices Design and construction Congresses.".
- 98158683 subject "Thin films Congresses.".
- 98158683 title "Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes / editors, G. S. Mathad, M. Meyyappan, M. Engelhardt ; Dielectric Science & Technology, Electronics, and Electrodeposition Divisions.".
- 98158683 title "Thin film processes".
- 98158683 type "text".