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- 98184993 contributor B8490056.
- 98184993 contributor B8490057.
- 98184993 contributor B8490058.
- 98184993 created "c1997.".
- 98184993 date "1997".
- 98184993 date "c1997.".
- 98184993 dateCopyrighted "c1997.".
- 98184993 description "Includes bibliographical references and index.".
- 98184993 extent "vii, 284 p. :".
- 98184993 identifier "0791818438".
- 98184993 isPartOf "DSC (Series) ; v. 62.".
- 98184993 isPartOf "DSC ; vol. 62".
- 98184993 isPartOf "HTD (Series) ; v. 354.".
- 98184993 isPartOf "HTD ; vol. 354".
- 98184993 issued "1997".
- 98184993 issued "c1997.".
- 98184993 language "eng".
- 98184993 publisher "New York, N.Y. : American Society of Mechanical Engineers,".
- 98184993 subject "621.381 21".
- 98184993 subject "Electromechanical devices Congresses.".
- 98184993 subject "Microelectromechanical systems Congresses.".
- 98184993 subject "Microelectronics Congresses.".
- 98184993 subject "TK7874 .M457 1997".
- 98184993 title "Microelectromechanical systems (MEMS)--1997-- : micromechanical systems, microscale energy transport : presented at the 1997 International Mechanical Engineering Congress and Exposition, November 16-21, 1997, Dallas, Texas / edited by W.S. Chang ... [et al.] ; sponsored by the Dynamic Systems and Control Division, ASME ... [et al.].".
- 98184993 type "text".