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- 98203944 alternative "Interconnect and contact metallization".
- 98203944 contributor B8509936.
- 98203944 contributor B8509937.
- 98203944 contributor B8509938.
- 98203944 created "c1998.".
- 98203944 date "1998".
- 98203944 date "c1998.".
- 98203944 dateCopyrighted "c1998.".
- 98203944 description "Includes bibliographical references and index.".
- 98203944 extent "viii, 276 p. :".
- 98203944 identifier "1566771846".
- 98203944 isPartOf "Proceedings (Electrochemical Society) ; v. 97-31.".
- 98203944 isPartOf "Proceedings ; 97-31".
- 98203944 issued "1998".
- 98203944 issued "c1998.".
- 98203944 language "eng".
- 98203944 publisher "Pennington, NJ : Electrochemical Society,".
- 98203944 subject "621.39/5 21".
- 98203944 subject "Dielectrics Congresses.".
- 98203944 subject "Electrochemical metallizing Congresses.".
- 98203944 subject "Integrated circuits Ultra large scale integration Design and construction Congresses.".
- 98203944 subject "Integrated circuits Ultra large scale integration Materials Congresses.".
- 98203944 subject "Plasma-enhanced chemical vapor deposition Congresses.".
- 98203944 subject "TK7874.76 .S97 1997".
- 98203944 title "Interconnect and contact metallization".
- 98203944 title "Proceedings of the Symposium on Interconnect and Contact Metallization / editor, Hazara S. Rathore ... [et al.].".
- 98203944 type "text".