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- 98226760 contributor B8534650.
- 98226760 contributor B8534651.
- 98226760 created "c1998.".
- 98226760 date "1998".
- 98226760 date "c1998.".
- 98226760 dateCopyrighted "c1998.".
- 98226760 description "Includes bibliographical references and index.".
- 98226760 extent "vii, 282 p. :".
- 98226760 identifier "0819427152".
- 98226760 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3276.".
- 98226760 isPartOf "SPIE proceedings series ; v. 3276".
- 98226760 issued "1998".
- 98226760 issued "c1998.".
- 98226760 language "eng".
- 98226760 publisher "Bellingham, Wash., USA : SPIE,".
- 98226760 subject "621.36/93 21".
- 98226760 subject "Integrated optics Congresses.".
- 98226760 subject "Microelectromechanical systems Congresses.".
- 98226760 subject "Micromechanics Congresses.".
- 98226760 subject "Miniature electronic equipment Congresses.".
- 98226760 subject "Optical scanners Congresses.".
- 98226760 subject "TA1660 .M57 1998".
- 98226760 title "Miniaturized systems with micro-optics and micromechanics III : 26-27 January 1998, San Jose, California / M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 98226760 type "text".