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- 98226766 alternative "Micromachined devices and components 4".
- 98226766 alternative "Micromachined devices and components four".
- 98226766 contributor B8534662.
- 98226766 contributor B8534663.
- 98226766 created "c1998.".
- 98226766 date "1998".
- 98226766 date "c1998.".
- 98226766 dateCopyrighted "c1998.".
- 98226766 description "Includes bibliographical references and author index.".
- 98226766 extent "viii, 440 p. :".
- 98226766 identifier "0819429732".
- 98226766 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3514.".
- 98226766 isPartOf "SPIE proceedings series ; v. 3514".
- 98226766 issued "1998".
- 98226766 issued "c1998.".
- 98226766 language "eng".
- 98226766 publisher "Bellingham, Washington : SPIE,".
- 98226766 subject "620/.5 21".
- 98226766 subject "Electromechanical devices Congresses.".
- 98226766 subject "Micromachining Congresses.".
- 98226766 subject "Micromechanics Congresses.".
- 98226766 subject "TJ163 .M4933 1998".
- 98226766 title "Micromachined devices and components 4".
- 98226766 title "Micromachined devices and components IV : 21-22 September, 1998, Santa Clara, California / Patrick J. French, Kevin Chau, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.].".
- 98226766 title "Micromachined devices and components four".
- 98226766 type "text".