Matches in Library of Congress for { <http://lccn.loc.gov/98226775> ?p ?o. }
Showing items 1 to 23 of
23
with 100 items per page.
- 98226775 contributor B8534679.
- 98226775 contributor B8534680.
- 98226775 created "c1998.".
- 98226775 date "1998".
- 98226775 date "c1998.".
- 98226775 dateCopyrighted "c1998.".
- 98226775 description "Includes bibliographical references and index.".
- 98226775 extent "xv, 744 p. :".
- 98226775 identifier "0819427772".
- 98226775 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3332.".
- 98226775 isPartOf "SPIE proceedings series ; v. 3332".
- 98226775 issued "1998".
- 98226775 issued "c1998.".
- 98226775 language "eng".
- 98226775 publisher "Bellingham, Wash., USA : SPIE,".
- 98226775 subject "621.3815/31 21".
- 98226775 subject "Integrated circuits Inspection Congresses.".
- 98226775 subject "Integrated circuits Measurement Congresses.".
- 98226775 subject "Microlithography Congresses.".
- 98226775 subject "Process control Congresses.".
- 98226775 subject "TK7874 .M4376 1998".
- 98226775 title "Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, Santa Clara, California / Bhanwar Singh, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH.".
- 98226775 type "text".