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- 98227311 alternative "Smart electronics and MEMS".
- 98227311 contributor B8535317.
- 98227311 contributor B8535318.
- 98227311 created "c1998.".
- 98227311 date "1998".
- 98227311 date "c1998.".
- 98227311 dateCopyrighted "c1998.".
- 98227311 description "Includes bibliographical references and index.".
- 98227311 extent "ix, 430 p. :".
- 98227311 identifier "0819427721".
- 98227311 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3328.".
- 98227311 isPartOf "SPIE proceedings series ; v. 3328".
- 98227311 issued "1998".
- 98227311 issued "c1998.".
- 98227311 language "eng".
- 98227311 publisher "Bellingham, Wash., USA : SPIE,".
- 98227311 subject "621.381 21".
- 98227311 subject "Actuators Congresses.".
- 98227311 subject "Microelectromechanical systems Congresses.".
- 98227311 subject "Microelectronics Materials Congresses.".
- 98227311 subject "Smart materials Congresses.".
- 98227311 subject "TK7874 .S58 1998".
- 98227311 title "Smart electronics and MEMS".
- 98227311 title "Smart structures and materials 1998. Smart electronics and MEMS : 2-4 March 1998, San Diego, California / Vijay K. Varadan ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ... [et al.] ; cooperating organizations, Air Force Research Laboratory ... [et al.].".
- 98227311 type "text".