Matches in Library of Congress for { <http://lccn.loc.gov/98233147> ?p ?o. }
Showing items 1 to 27 of
27
with 100 items per page.
- 98233147 alternative "Optical microlithography 11".
- 98233147 alternative "Opticl microlithography eleven".
- 98233147 contributor B8541579.
- 98233147 contributor B8541580.
- 98233147 created "c1998.".
- 98233147 date "1998".
- 98233147 date "c1998.".
- 98233147 dateCopyrighted "c1998.".
- 98233147 description "Includes bibliographical references and author index.".
- 98233147 extent "xv, 1090 p. :".
- 98233147 identifier "0819427799".
- 98233147 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3334.".
- 98233147 isPartOf "SPIE proceedings series ; v. 3334".
- 98233147 issued "1998".
- 98233147 issued "c1998.".
- 98233147 language "eng".
- 98233147 publisher "Bellingham, Washington : SPIE,".
- 98233147 subject "621.3815/31 21".
- 98233147 subject "Integrated circuits Masks Congresses.".
- 98233147 subject "Manufacturing processes Congresses.".
- 98233147 subject "Microlithography Congresses.".
- 98233147 subject "TK7872.M3 O68 1998".
- 98233147 subject "X-ray lithography Congresses.".
- 98233147 title "Optical microlithography 11".
- 98233147 title "Optical microlithography XI : 25-27 February, 1998, Santa Clara, California / Luc Van den Hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.".
- 98233147 title "Opticl microlithography eleven".
- 98233147 type "text".