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- 98233179 contributor B8541628.
- 98233179 contributor B8541629.
- 98233179 created "c1998.".
- 98233179 date "1998".
- 98233179 date "c1998.".
- 98233179 dateCopyrighted "c1998.".
- 98233179 description "Includes bibliographical references and index.".
- 98233179 extent "vii, 322 p. :".
- 98233179 identifier "081942966X".
- 98233179 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 3507".
- 98233179 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3507.".
- 98233179 issued "1998".
- 98233179 issued "c1998.".
- 98233179 language "eng".
- 98233179 publisher "Bellingham, Washington : SPIE,".
- 98233179 subject "621.3815 21".
- 98233179 subject "Dielectric films Congresses.".
- 98233179 subject "Integrated circuits Design and construction Congresses.".
- 98233179 subject "Metallizing Congresses.".
- 98233179 subject "Plasma etching Congresses.".
- 98233179 subject "TK7874 .P7519 1998".
- 98233179 title "Process, equipment, and materials control in integrated circuit manufacturing IV : 22-24 September, 1998, Santa Clara, California / Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.].".
- 98233179 type "text".