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- 98233181 contributor B8541632.
- 98233181 contributor B8541633.
- 98233181 created "c1998.".
- 98233181 date "1998".
- 98233181 date "c1998.".
- 98233181 dateCopyrighted "c1998.".
- 98233181 description "Includes bibliographical references and index.".
- 98233181 extent "ix, 344 p. :".
- 98233181 identifier "0819427136".
- 98233181 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3274.".
- 98233181 isPartOf "SPIE proceedings series ; v. 3274".
- 98233181 issued "1998".
- 98233181 issued "c1998.".
- 98233181 language "eng".
- 98233181 publisher "Bellingham, Wash., USA : SPIE,".
- 98233181 subject "621.381 21".
- 98233181 subject "Lasers Industrial applications Congresses.".
- 98233181 subject "Manufacturing processes Congresses.".
- 98233181 subject "Microelectronics industry Congresses.".
- 98233181 subject "Optoelectronics industry Congresses.".
- 98233181 subject "TK7836 .L37 1998".
- 98233181 title "Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California / Jan J. Dubowski, Peter E. Dyer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 98233181 type "text".