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- 99058801 alternative "Chemical-mechanical polishing".
- 99058801 contributor B8683875.
- 99058801 created "c2000.".
- 99058801 date "2000".
- 99058801 date "c2000.".
- 99058801 dateCopyrighted "c2000.".
- 99058801 description "Includes bibliographical references and index.".
- 99058801 extent "ix, 281 p. :".
- 99058801 identifier "1558994734".
- 99058801 identifier 99058801-d.html.
- 99058801 isPartOf "Materials Research Society symposia proceedings ; v. 566.".
- 99058801 isPartOf "Materials Research Society symposium proceedings ; v. 566".
- 99058801 issued "2000".
- 99058801 issued "c2000.".
- 99058801 language "eng".
- 99058801 publisher "Warrendale, Pa. : Materials Research Society,".
- 99058801 subject "621.3815/2 21".
- 99058801 subject "Chemical mechanical planarization Congresses.".
- 99058801 subject "Electrolytic polishing Congresses.".
- 99058801 subject "Grinding and polishing Congresses.".
- 99058801 subject "TS654.5 .C48 2000".
- 99058801 title "Chemical-mechanical polishing".
- 99058801 title "Chemical-mechanical polishing--fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A. / editors, S.V. Babu ... [et al.].".
- 99058801 type "text".