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- 99062162 alternative "Process physics and modeling in semiconductor technology".
- 99062162 contributor B8686857.
- 99062162 contributor B8686858.
- 99062162 contributor B8686859.
- 99062162 created "c1999.".
- 99062162 date "1999".
- 99062162 date "c1999.".
- 99062162 dateCopyrighted "c1999.".
- 99062162 description "Includes bibliographic references and indexes.".
- 99062162 extent "viii, 229 p. :".
- 99062162 identifier "1566772249".
- 99062162 isPartOf "Proceedings (Electrochemical Society) ; v. 99-2.".
- 99062162 isPartOf "Proceedings ; v. 99-2".
- 99062162 issued "1999".
- 99062162 issued "c1999.".
- 99062162 language "eng".
- 99062162 publisher "Pennington, New Jersey : Electrochemical Society,".
- 99062162 subject "621.3815/2 21".
- 99062162 subject "Crystals Defects Mathematical models Congresses.".
- 99062162 subject "Ion implantation Mathematical models Congresses.".
- 99062162 subject "Semiconductors Mathematical models Congresses.".
- 99062162 subject "TK7871.85 .I5835 1999".
- 99062162 title "Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology / editors, C.S. Murthy, G.R. Srinivasan, S.T. Dunham ; Electronics Division [of the Electrochemical Society].".
- 99062162 title "Process physics and modeling in semiconductor technology".
- 99062162 type "text".