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- 99062262 alternative "Electrochemical processing in ULSI fabrication".
- 99062262 alternative "Interconnect and contact metallization: materials, processes, and reliability".
- 99062262 contributor B8686956.
- 99062262 contributor B8686957.
- 99062262 contributor B8686958.
- 99062262 created "c1999.".
- 99062262 date "1999".
- 99062262 date "c1999.".
- 99062262 dateCopyrighted "c1999.".
- 99062262 description "Includes bibliographic references and indexes.".
- 99062262 extent "viii, 274 p. :".
- 99062262 identifier "1566772001".
- 99062262 isPartOf "Proceedings (Electrochemical Society) ; v. 98-6.".
- 99062262 isPartOf "Proceedings ; v. 98-6".
- 99062262 issued "1999".
- 99062262 issued "c1999.".
- 99062262 language "eng".
- 99062262 publisher "Pennington, New Jersey : Electrochemical Society,".
- 99062262 subject "621.39/5 21".
- 99062262 subject "Electric contacts Congresses.".
- 99062262 subject "Electrochemistry Congresses.".
- 99062262 subject "Integrated circuits Design and construction Congresses.".
- 99062262 subject "Semiconductors Design and construction Congresses.".
- 99062262 subject "TK7874 .P75177 1999".
- 99062262 title "Electrochemical processing in ULSI fabrication".
- 99062262 title "Interconnect and contact metallization: materials, processes, and reliability".
- 99062262 title "Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I : and Interconnect and Contact Metallization--Materials, Processes, and Reliability / editors, P.C. Andricacos ... [et al.] ; Dielectric Science and Technology, Electronics, and Electrodeposition Divisions [of the Electrochemical Society].".
- 99062262 type "text".