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- 99066095 contributor B8690011.
- 99066095 contributor B8690012.
- 99066095 contributor B8690013.
- 99066095 created "1999.".
- 99066095 date "1999".
- 99066095 date "1999.".
- 99066095 dateCopyrighted "1999.".
- 99066095 description "Includes bibliographical references and indexes.".
- 99066095 extent "xiii, 386 p. :".
- 99066095 identifier "1566772419".
- 99066095 isPartOf "Proceedings (Electrochemical Society) v.99-18.".
- 99066095 isPartOf "Proceedings ; v. 99-18".
- 99066095 issued "1999".
- 99066095 issued "1999.".
- 99066095 language "eng".
- 99066095 publisher "Pennington, NJ : Electrochemical Society,".
- 99066095 subject "621.39/5 21".
- 99066095 subject "Integrated circuits Ultra large scale integration Congresses.".
- 99066095 subject "TK7874.76 .U475 1999".
- 99066095 title "ULSI process integration : proceedings of the first international symposium / editors, C.L. Claeys ... [et al.].".
- 99066095 type "text".