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- 99069039 contributor B8692407.
- 99069039 contributor B8692408.
- 99069039 created "2000.".
- 99069039 date "2000".
- 99069039 date "2000.".
- 99069039 dateCopyrighted "2000.".
- 99069039 description "Includes bibliographical references and index.".
- 99069039 extent "ix, 400 p. :".
- 99069039 identifier "1566772311".
- 99069039 isPartOf "Proceedings (Electrochemical Society) ; v. 99-9.".
- 99069039 isPartOf "Proceedings ; v. 99-9".
- 99069039 issued "2000".
- 99069039 issued "2000.".
- 99069039 language "eng".
- 99069039 publisher "Pennington, NJ : Electrochemical Society Inc.,".
- 99069039 subject "621.39/5 21".
- 99069039 subject "Electric contacts Congresses.".
- 99069039 subject "Electrochemistry Congresses.".
- 99069039 subject "Integrated circuits Design and construction Congresses.".
- 99069039 subject "Semiconductors Design and construction Congresses.".
- 99069039 subject "TK7874 .E475 2000".
- 99069039 title "Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium / editors, P. C. Andricacos ... [et al.].".
- 99069039 type "text".