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- 99086920 contributor B8699494.
- 99086920 contributor B8699495.
- 99086920 created "c2000.".
- 99086920 date "2000".
- 99086920 date "c2000.".
- 99086920 dateCopyrighted "c2000.".
- 99086920 description "Includes bibliographical references.".
- 99086920 extent "xi, 169 p. :".
- 99086920 identifier "0803126158".
- 99086920 issued "2000".
- 99086920 issued "c2000.".
- 99086920 language "eng".
- 99086920 publisher "West Conshocken, Pa. : ASTM,".
- 99086920 subject "621.3815/2 21".
- 99086920 subject "Dielectrics Testing.".
- 99086920 subject "Gate array circuits Materials.".
- 99086920 subject "Integrated circuits Wafer-scale integration Reliability.".
- 99086920 subject "Semiconductor wafers Reliability.".
- 99086920 subject "Silicon oxide films Testing.".
- 99086920 subject "TK7871.85. G32 2000".
- 99086920 title "Gate dielectric integrity : material, process, and tool qualification / Dinesh C. Gupta and George A. Brown, editors.".
- 99086920 type "text".