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- 99194427 contributor B8753165.
- 99194427 contributor B8753166.
- 99194427 created "c1998.".
- 99194427 date "1998".
- 99194427 date "c1998.".
- 99194427 dateCopyrighted "c1998.".
- 99194427 description "Includes bibliographical references and author index.".
- 99194427 extent "vii, 240 p. :".
- 99194427 identifier "0819429694".
- 99194427 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3510.".
- 99194427 isPartOf "SPIE proceedings series ; v. 3510".
- 99194427 issued "1998".
- 99194427 issued "c1998.".
- 99194427 language "eng".
- 99194427 publisher "Bellingham, Washington : SPIE,".
- 99194427 subject "621.381 21".
- 99194427 subject "Integrated circuits Defects Congresses.".
- 99194427 subject "Integrated circuits Reliability Congresses.".
- 99194427 subject "Integrated circuits Testing Congresses.".
- 99194427 subject "Integrated circuits Very large scale integration Congresses.".
- 99194427 subject "Microelectronics Congresses.".
- 99194427 subject "TK7874 .M4687 1998".
- 99194427 title "Microelectronic manufacturing yield, reliability, and failure analysis IV : 23-24 September, 1998, Santa Clara, California / Sharad Prasad, Hans-Dieter Hartmann, Tohru Tsujide, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.].".
- 99194427 type "text".