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- 99196349 contributor B8755193.
- 99196349 contributor B8755194.
- 99196349 created "c1998.".
- 99196349 date "1998".
- 99196349 date "c1998.".
- 99196349 dateCopyrighted "c1998.".
- 99196349 description "Includes bibliographical references and author index.".
- 99196349 extent "vii, 224 p. :".
- 99196349 identifier "0819429678".
- 99196349 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 3508".
- 99196349 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3508.".
- 99196349 issued "1998".
- 99196349 issued "c1998.".
- 99196349 language "eng".
- 99196349 publisher "Bellingham, Washington : SPIE,".
- 99196349 subject "621.39/5 21".
- 99196349 subject "Dielectric films Congresses.".
- 99196349 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 99196349 subject "Metallizing Congresses.".
- 99196349 subject "Plasma etching Congresses.".
- 99196349 subject "TK7874.75 .M85 1998".
- 99196349 title "Multilevel interconnect technology II : 23-24 September, Santa Clara, California / Mart Graef, Divyseh N. Patel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.].".
- 99196349 type "text".