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- 99200311 contributor B8759342.
- 99200311 contributor B8759343.
- 99200311 created "c1998.".
- 99200311 date "1998".
- 99200311 date "c1998.".
- 99200311 dateCopyrighted "c1998.".
- 99200311 description "Includes bibliographical references and author index.".
- 99200311 extent "xi, 442 p. :".
- 99200311 identifier "0819429716".
- 99200311 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3512.".
- 99200311 isPartOf "SPIE proceedings series, 0277-786X ; v. 3512".
- 99200311 issued "1998".
- 99200311 issued "c1998.".
- 99200311 language "eng".
- 99200311 publisher "Bellingham, Wash. : SPIE,".
- 99200311 subject "671.3/5 21".
- 99200311 subject "Electromechanical devices Congresses.".
- 99200311 subject "Micromachining Congresses.".
- 99200311 subject "Micromechanics Congresses.".
- 99200311 subject "TJ1191.5 .M38 1998".
- 99200311 title "Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California / Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.].".
- 99200311 type "text".