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- 99200342 contributor B8759389.
- 99200342 contributor B8759390.
- 99200342 created "c1998.".
- 99200342 date "1998".
- 99200342 date "c1998.".
- 99200342 dateCopyrighted "c1998.".
- 99200342 description "Includes bibliographical references and author index.".
- 99200342 extent "xi, 402 p. :".
- 99200342 identifier "0819429708".
- 99200342 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3511.".
- 99200342 isPartOf "SPIE proceedings series ; v. 3511".
- 99200342 issued "1998".
- 99200342 issued "c1998.".
- 99200342 language "eng".
- 99200342 publisher "Bellingham, Wash. : SPIE,".
- 99200342 subject "621.3815/2 21".
- 99200342 subject "Electromechanical devices Design and construction Congresses.".
- 99200342 subject "Microfabrication Congresses.".
- 99200342 subject "Micromachining Congresses.".
- 99200342 subject "TJ1191.5 .M5523 1998".
- 99200342 title "Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California / James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].".
- 99200342 type "text".