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- 99207051 alternative "Microstructures and fabricated systems 4".
- 99207051 alternative "Microstructures and fabricated systems IV".
- 99207051 contributor B8766687.
- 99207051 contributor B8766688.
- 99207051 contributor B8766689.
- 99207051 created "c1998.".
- 99207051 date "1998".
- 99207051 date "c1998.".
- 99207051 dateCopyrighted "c1998.".
- 99207051 description "Includes bibliographical references and index.".
- 99207051 extent "viii, 270 p. :".
- 99207051 identifier "1566772060".
- 99207051 isPartOf "Proceedings (Electrochemical Society) ; 98-14.".
- 99207051 isPartOf "Proceedings ; 98-14".
- 99207051 issued "1998".
- 99207051 issued "c1998.".
- 99207051 language "eng".
- 99207051 publisher "Pennington, NJ : Electrochemical Society,".
- 99207051 subject "621.381 21".
- 99207051 subject "Microelectronics Congresses.".
- 99207051 subject "Micromechanics Congresses.".
- 99207051 subject "Microstructure Congresses.".
- 99207051 subject "TK7874 .I5827 1998".
- 99207051 title "Microstructures and fabricated systems 4".
- 99207051 title "Microstructures and fabricated systems IV".
- 99207051 title "Proceedings of the Symposium on Microstructures and Microfabricated Systems IV / editors Peter J. Hesketh, Henry Hughes, Wayne E. Bailey.".
- 99207051 type "text".