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- 99209822 contributor B8769879.
- 99209822 contributor B8769880.
- 99209822 contributor B8769881.
- 99209822 created "1999.".
- 99209822 date "1999".
- 99209822 date "1999.".
- 99209822 dateCopyrighted "1999.".
- 99209822 description "Includes bibliographical references".
- 99209822 extent "170-350 p. :".
- 99209822 identifier "0080436129".
- 99209822 identifier 99209822-d.html.
- 99209822 identifier 99209822-t.html.
- 99209822 isPartOf "European Materials Research Society symposia proceedings ; v. 84".
- 99209822 issued "1999".
- 99209822 issued "1999.".
- 99209822 language "eng".
- 99209822 publisher "Amsterdam ; New York : Elsevier,".
- 99209822 subject "621.3815/2 21".
- 99209822 subject "Integrated circuits Ultra large scale integration Design and construction Congresses.".
- 99209822 subject "Rapid thermal processing Congresses.".
- 99209822 subject "Semiconductor doping Congresses.".
- 99209822 subject "TK7871.85 .S9535 1998".
- 99209822 title "Rapid thermal processing : proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998 / edited by A. Slaoui ... [et al.].".
- 99209822 type "text".