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- 99217176 alternative "Digest of papers".
- 99217176 contributor B8777592.
- 99217176 contributor B8777593.
- 99217176 created "c1998.".
- 99217176 date "1998".
- 99217176 date "c1998.".
- 99217176 dateCopyrighted "c1998.".
- 99217176 description "Includes bibliographical references and author index.".
- 99217176 extent "xxviii, 355 p. :".
- 99217176 identifier "0780344642 (microfiche)".
- 99217176 identifier "4930813832 (softbound)".
- 99217176 issued "1998".
- 99217176 issued "c1998.".
- 99217176 language "eng".
- 99217176 publisher "[Piscataway, New Jersey : IEEE],".
- 99217176 subject "620.5 21".
- 99217176 subject "Microfabrication Congresses.".
- 99217176 subject "Nanotechnology Congresses.".
- 99217176 subject "QC176.8.M5 I58 1998".
- 99217176 title "Digest of papers".
- 99217176 title "Microprocesses and Nanotechnology '98 : digest of papers : 1998 International Microprocesses and Nanotechnology Conference, July 13-16, 1998, Kyoungju, Korea / sponsored by the Japan Society of Applied Physics ... [et al.].".
- 99217176 type "text".