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- 99233639 alternative "Ätzverfahren für die Mikrotechnik. English".
- 99233639 contributor B8794950.
- 99233639 created "c1999.".
- 99233639 date "1999".
- 99233639 date "c1999.".
- 99233639 dateCopyrighted "c1999.".
- 99233639 description "Includes bibliographical references ([345]-360) and index.".
- 99233639 extent "xvi, 368 p. :".
- 99233639 identifier "3527295615".
- 99233639 identifier 99233639.html.
- 99233639 identifier 99233639.html.
- 99233639 issued "1999".
- 99233639 issued "c1999.".
- 99233639 language "eng ger".
- 99233639 language "eng".
- 99233639 publisher "Weinheim ; New York : Wiley-VCH,".
- 99233639 subject "621.3815/31 21".
- 99233639 subject "Masks (Electronics)".
- 99233639 subject "Microlithography.".
- 99233639 subject "Plasma etching.".
- 99233639 subject "TK7872.M3 K64 1999".
- 99233639 title "Ätzverfahren für die Mikrotechnik. English".
- 99233639 title "Etching in microsystem technology / Michael Köhler ; translated by Antje Wiegand.".
- 99233639 type "text".