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- 99493124 contributor B8822113.
- 99493124 created "c1999.".
- 99493124 date "1999".
- 99493124 date "c1999.".
- 99493124 dateCopyrighted "c1999.".
- 99493124 description "Includes bibliographical references (p. [113]-123).".
- 99493124 extent "123 p. :".
- 99493124 identifier "3540655603".
- 99493124 isPartOf "IPA-IAO Forschung und Praxis ; Bd. 281".
- 99493124 issued "1999".
- 99493124 issued "c1999.".
- 99493124 language "ger".
- 99493124 publisher "Berlin ; New York : Springer,".
- 99493124 subject "621.3815/2 21".
- 99493124 subject "Clean rooms.".
- 99493124 subject "Contamination (Technology) Prevention.".
- 99493124 subject "Semiconductors Defects Prevention.".
- 99493124 subject "Semiconductors Design and construction.".
- 99493124 subject "TK7871.85 .S3855 1999".
- 99493124 title "Untersuchungen von Reinheitssystemen zur Herstellung von Halbleiterprodukten / Jochen Schliesser.".
- 99493124 type "text".