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{ <http://viaf.org/viaf/122859226> ?p ?o. }
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122859226
alternateName
"
Symposium on the Deposition of Thin Films by Sputtering 2 1967 Rochester, NY
"
.
122859226
name
"
Symposium on the Deposition of Thin Films by Sputtering
"
.
122859226
sameAs
5271602-8
.
122859226
type
Organization
.
122859226
seeAlso
skos:Concept
.