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- 125210226 alternateName "CMP-MIC".
- 125210226 alternateName "International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference 3 1998 Santa Clara, Calif".
- 125210226 alternateName "International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference".
- 125210226 name "International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference".
- 125210226 sameAs 5304676-6.
- 125210226 type Organization.
- 125210226 seeAlso skos:Concept.