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- 128518458 alternateName "International Conference on Micro-Electro-, -Opto-, -Mechanic Systems and Components 1 1990 Berlin, West".
- 128518458 alternateName "International Meeting on Microsystem Technologies".
- 128518458 name "International Conference on Micro-Electro-, -Opto-, -Mechanic Systems and Components".
- 128518458 sameAs 2114498-9.
- 128518458 type Organization.
- 128518458 seeAlso skos:Concept.