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- 128763854 alternateName "Conference on Micromachined Devices and Components 5 1999 Santa Clara, Calif".
- 128763854 alternateName "SPIE Conference on Micromachined Devices and Components".
- 128763854 name "Conference on Micromachined Devices and Components".
- 128763854 sameAs 6008369-4.
- 128763854 type Organization.
- 128763854 seeAlso skos:Concept.