Matches in VIAF for { <http://viaf.org/viaf/130071811> ?p ?o. }
Showing items 1 to 9 of
9
with 100 items per page.
- 130071811 alternateName "CMP MIC".
- 130071811 alternateName "International CMP Planarization for ULSI Multilevel Interconnection Conference".
- 130071811 alternateName "International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference 6 2001 Santa Clara, Calif".
- 130071811 alternateName "International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference".
- 130071811 alternateName "International Chemical-Mechanical Polish for ULSI Multilevel Interconnection Conference".
- 130071811 name "International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference".
- 130071811 sameAs 6095346-9.
- 130071811 type Organization.
- 130071811 seeAlso skos:Concept.